Triethylgallium


Triethylgallium, Ga3, or TEGa, is a metalorganic source of gallium for metalorganic vapour phase epitaxy of compound semiconductors.

Properties

TEGa is a clear, colorless, pyrophoric liquid and should be handled with caution.

Applications

TEGa can be a useful alternative to trimethylgallium in the metalorganic vapour phase epitaxy of compound semiconductors because films grown using TEGa have been shown to have a lower carbon impurity concentration.